二工位垂直式晶圆倒片机 2 Station Vertical Transfer

二工位垂直式晶圆倒片机

2 Station Vertical Transfer

-25 to 25 Wafers

-PP Cassette to PP Cassette, and Back

-Shipping Cassette to Shipping Cassette , and Back

-PP Cassette to PFA Cassette（清洗）, and Back

-PP Cassette to Quartz/ SiC Boat, and Back

-选配：变距模组（4.74mm-6.35mm）

-减少晶圆划伤

-可用于薄片转移

-自动识别花篮位置和晶圆

-垂直向下消除静电装置（选配）